Physical Properties | Metric | English | Comments |
---|---|---|---|
Thickness | 0.100 - 0.150 microns | 0.00394 - 0.00591 mil | |
Dow SiLK™ Y 120 Semiconductor Dielectric Resin SiLK™ Y 120 has an average pore size of < 2nm and a range of 1-3 nm, porous SiLK™ resins enables continuous Tantulum PVD barriers for 65 nm technology and beyond. Information provided by Dow |