Chemical Properties | Metric | English | Comments |
---|---|---|---|
Ionic Impurities - Na (Sodium) | 18 ppm | 18 ppm | ICP/MS |
Quadrant EPP Semitron® CMP LL5 Polyester (ASTM Product Data Sheet) Enhanced semi-crystalline polyester product for extended service in CMP retaining rings. Superior performance, especially in oxide processes, and cost effective relative to standard ring materials. .. |
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Ionic Impurities - Na (Sodium) | 18 ppm | 18 ppm | |
Epoxy Technology EPO-TEK® EV2002 Silver-filled, electrically conductive, flexible epoxy Material Description: Silver-filled, electrically conductive, flexible epoxyInformation Provided by Epoxy Technology |