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Saint-Gobain Spectrosil® 2200 Optical Fused Quartz

Category Ceramic , Glass , Oxide , Silicon Oxide
Manufacturer Saint-Gobain Quartz PLC
Trade Name Spectrosil®
Port Shanghai port,China
Trade Terms FOB, CFR, CIF
Payment Terms L/C, T/T, Western Union
Download PDF Saint-Gobain Spectrosil® 2200 Optical Fused Quartz.pdf
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Material Notes:
Spectrosil® 2200 grade is an excimer laser grade developed for maximum transmission and prolonged life in microlithography and other critical deep UV applications using KrF (248 nm) and ArF (193 nm) excimer lasers.Spectrosil® is a synthetic fused silica manufactured using a patented, environmentally friendly process that results in a virtually chlorine-free material of exceptional purity which is bubble-free and fluorescence-free. The 2000 series has excellent optical transmission from 180 nm in the deep UV through to 2000 nm in the IR Available in ingot, rod, tube, and components.General properties of Fused Silica and Fused quartz: A very wide transmission range from UV to near IR; extremely high optical transmission, excellent resistance to high power laser energy, excellent homogeneity, high temperature resistance, very low thermal expansion (resistance to thermal shock), and chemical inertness. General uses for optical quartz are microlithography optical systems, optical fibers, photomasks, laser optics, LCD displays, light guides, optical, IR , and UV windows, spectrophotometer cells, slides, optical pyrometers, and lamp bodies/components.Information provided by Saint-Gobain Quartz PLC.
Physical Properties Metric English Comments
Density 2.21 g/cc
0.0798 lb/in³
Mechanical Properties Metric English Comments
Hardness, Knoop 820
820
Vickers Microhardness 1050 - 1350
1050 - 1350
kg/m² Vickers DPH
Hardness, Mohs 7.0
7.0
Modulus of Elasticity 74.0 GPa
10700 ksi
Flexural Strength 50.0 MPa
7250 psi
Bending Strength
Compressive Strength 1100 MPa
160000 psi
Poissons Ratio 0.17
0.17
Shear Modulus 31.0 GPa
4500 ksi
Thermal Properties Metric English Comments
CTE, linear 0.540 µm/m-°C

@Temperature 0.000 - 1000 °C
0.300 µin/in-°F

@Temperature 32.0 - 1830 °F
average
Specific Heat Capacity 0.750 J/g-°C
0.179 BTU/lb-°F
Thermal Conductivity 2.00 W/m-K
13.9 BTU-in/hr-ft²-°F
Maximum Service Temperature, Air 1050 °C
1920 °F
Normal Conditions
1350 °C
2460 °F
Extended periods if cycles remain above 300°C
1350 °C
2460 °F
1650 °C
3000 °F
Quick Immersion
Softening Point 1710 °C
3110 °F
Varies with thermal history
Annealing Point 1100 °C
2010 °F
Varies with thermal history
Strain Point 990 °C
1810 °F
Varies with thermal history
Optical Properties Metric English Comments
Refractive Index 1.457

@Wavelength 632.8 nm
1.457

@Wavelength 632.8 nm
n<sub>He-Ne</sub>; Temperature Coefficient = 10.0 ppm/K
1.4667

@Wavelength 435.83 nm
1.4667

@Wavelength 435.83 nm
n<sub>g</sub>; Temperature Coefficient = 10.6 ppm/K
Transmission, Visible 95 %
95 %
Including Fresnel reflection for 10 mm pathlength
UV Transmittance 95 %

@Wavelength <=200 nm,
Thickness 10.0 mm
95 %

@Wavelength <=200 nm,
Thickness 0.394 in
Including Fresnel reflection for 10 mm path length.
>= 99.5 %

@Thickness 10.0 mm,
Wavelength 193.4 nm
>= 99.5 %

@Thickness 0.394 in,
Wavelength 193.4 nm
>= 99.9 %

@Thickness 10.0 mm,
Wavelength 240 nm
>= 99.9 %

@Thickness 0.394 in,
Wavelength 240 nm
Component Elements Properties Metric English Comments
SiO2 >= 99.999 %
>= 99.999 %
Electrical Properties Metric English Comments
Electrical Resistivity 2.00e+10 ohm-cm

@Temperature 800 °C
2.00e+10 ohm-cm

@Temperature 1470 °F
Dielectric Constant 3.78

@Frequency 100 - 2.50e+10 Hz
3.78

@Frequency 100 - 2.50e+10 Hz
Dissipation Factor 0.000060

@Frequency 1e+9 Hz
0.000060

@Frequency 1e+9 Hz
0.00075

@Frequency 1000 Hz
0.00075

@Frequency 1000 Hz
Descriptive Properties Value Comments
Bubble Class 0
per DIN 58927
Bubbles; Sum of CSA < 0.03 mm²/100 cm³
Inclusions 0
Refractive Index Homogeneity < 10 x 10-6
Up to 200 mm (ingot/blank)
< 5 x 10-6
Up to 100 mm (ingot/blank)
Residual Strain <5 nm/cm
Striae 3
per MIL-G-174A; Direction Free
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