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Solvay Chemicals Sifren® 46 Hexafluoro-1,3-butadiene

Category Fluid
Manufacturer Solvay Chemicals
Trade Name Sifren®
Port Ningbo port,China
Trade Terms FOB, CFR, CIF
Payment Terms L/C, T/T, Western Union
Download PDF Solvay Chemicals Sifren® 46 Hexafluoro-1,3-butadiene.pdf
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Material Notes:
Sifren® 46 (C4F6 or Hexafluorobutadiene) C4F6 has a GWP=0 and it is the most advanced etching gas for critical applications. Its low C/F ratio and its insaturations allow achieving the highest aspect ratios in etching. Uses: Sifren® 46 is suggested for the use in plasma, ion beam or sputter etching in semiconductor devices manufacturing.Information provided by Solvay
Physical Properties Metric English Comments
Molecular Weight 162.03 g/mol
162.03 g/mol
Thermal Properties Metric English Comments
Melting Point -130 °C
-202 °F
Boiling Point 5.50 °C
41.9 °F
Descriptive Properties Value Comments
Appearance Gas
Color Colorless
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