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Solvay Chemicals COF2 Carbonyl difluoride

Category Fluid
Manufacturer Solvay Chemicals
Trade Name
Port Shanghai port,China
Trade Terms FOB, CFR, CIF
Payment Terms L/C, T/T, Western Union
Download PDF Solvay Chemicals COF2 Carbonyl difluoride.pdf
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Material Notes:
Carbonyl difluoride has GWP=1 and can replace PFCs in chamber cleaning and in etching processes Carbonyl difluoride: CAS-No.: 353-50-4 / EC-No.: 206-534-2Uses: Etching agent, Electronic industry, Surface treatment and Chemical intermediateInformation provided by Solvay
Thermal Properties Metric English Comments
Melting Point -114 °C
-173 °F
Boiling Point -83.1 °C
-118 °F
Descriptive Properties Value Comments
Appearance Liquefied gas
Color Colorless
Composition >99%
Carbonyl difluoride
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