Material Notes:
Specifically developed for flat panel display CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, FPD Blue™ 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications. FPD Blue 707 remains stable at service temperatures up to 220°C (428°F) and is ideally suited for large lid seals and bonded slit valve door seals.Applications:Endpoint WindowsValve sealsKF fitting sealsWindow sealsLid sealsGas inlet sealsSlit valve sealsChamber sealsInformation provided by Greene Tweed.