Greene Tweed CHEMRAZ® 640 Perfluoroelastomer

Chemraz® 640 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wager processing yields. Chemraz 640 is recommended for both static and dynamics, wet and dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) Chemraz 640 remains stable at service temperatures up to 554°F (290°C).Applications:Endpoint windowsValve sealsIsolator valve sealsLid sealsGas inlet/outlet sealsSlit valve sealsChamber sealsGasket sealsDispensing sealsRegulator sealsFiller sealsInformation provided by Greene Tweed.