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DuPont Performance Polymers Kalrez® 9100 Fluoroelastomer

Category Polymer , Thermoset , Fluoropolymer, TS , Thermoset Fluoroelastomer , Rubber or Thermoset Elastomer (TSE)
Manufacturer DuPont Performance Polymers (Former DuPont Elastomers)
Trade Name Kalrez®
Port Ningbo port,China
Trade Terms FOB, CFR, CIF
Payment Terms L/C, T/T, Western Union
Download PDF DuPont Performance Polymers Kalrez® 9100 Fluoroelastomer.pdf
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Material Notes:
DuPont™ Kalrez® 9100 perfluoroelastomers parts are an amber translucent product for PV cell manufacturing processes requiring resistance to fluorine-based plasma including amorphous/microcrystalline silicon thin film deposition. It exhibits very low weight loss and ultra-low particle generation in fluorine-based plasma, e.g., NF3, F2, etc. It also offers excellent resistance to dry process chemistry and has excellent thermal stability, compression set and outgassing properties. Kalrez® 9100 has good mechanical strength properties and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 300 °C is suggested. Features/Benefits Very low weight loss and ultra-low particle generation in fluorine-based plasma Excellent resistance to dry process chemistry Excellent thermal stability Excellent (low) compression set and outgassing properties Suggested Applications Gas valve/slit valve door seals Gas inlet/orifice seals Isolation valve seals Substrate handling pads Chamber lid seals
Mechanical Properties Metric English Comments
Hardness, Shore M 74
74
ASTM D1414, ASTM D2240
Compression Set 17 %

@Temperature 204 °C,
Time 252000 sec
17 %

@Temperature 399 °F,
Time 70.0 hour
ASTM D1414 and ASTM D395B
Thermal Properties Metric English Comments
Maximum Service Temperature, Air 300 °C
572 °F
DuPont Test Method
Descriptive Properties Value Comments
Color Translucent Amber
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