DuPont Performance Polymers Kalrez® 8002 FFKM Perfluoroelastomer

Kalrez® 8002 is a specialty compound targeted specifically for select semiconductor plasma and gas deposition applications. This clear, unfilled compound offers very low particle generation in oxygen and fluorine-based plasmas versus mineral-filled compounds. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength properties and is well suited for both static and low stress/low sealing force applications. A maximum continuous service temperature of 250°C (482°F) is suggested. Ultrapure postcleaning and packaging is standard for parts made from Kalrez® 8002.Information provided by manufacturer.This former DuPont Dow Elastomers product line is now produced by DuPont Performance Elastomers.