Material Notes:
Chemraz® 513 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. This material offers excellent performance history in static plasma, photolithography and diffusion processes where temperature do not exceed 210°C (410°F) and high-sealing loads are not used. The hardness of this material allows for some hardware finish inconsistencyApplications:Door sealsSlit valvesWindow sealsIsolator valve sealsLid sealsGas inlet sealsKF fitting sealsInformation provided by Greene Tweed.