Greene Tweed CHEMRAZ® 661 Perfluoroelastomer

Chemraz® 661 perfluoroelastomer is specifically developed by Greene Tweed to meet the unique demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance and reduced contamination resulting in less downtime and lower cost of ownership. Chemraz 661 is recommended for both static and dynamic dry wafer processing applications such as etch and CVD. Chemraz 661 remains stable at service temperatures up to 240°C (464°F).Applications:Window sealsBell jar sealsValve sealsKF fitting sealsIsolator valve sealsLid sealsGas inlet sealsSlit valve sealsInformation provided by Greene Tweed.