Greene Tweed CHEMRAZ® 629 Perfluoroelastomer

Chemraz® 629 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz 629 is developed from an advanced polymer utilizing fluoro-polymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) with challenging gland designs and reduced sealing loads. Chemraz 629 remains stable at service temperatures up to 260°C (500°F).Applications:Endpoint windowsBell jar sealsValve sealsKF fitting sealsWindow sealsIsolator valve sealsLid sealsGas inlet sealsSlit valve sealsChamber sealsInformation provided by Greene Tweed.